1

Micro-electro-mechanical radio-frequency switch fixed electrode by wet etching of AlSi-based multilayer

Year:
2012
Language:
english
File:
PDF, 1.90 MB
english, 2012
7

FINLAND

Year:
2007
Language:
english
File:
PDF, 197 KB
english, 2007
8

Finland

Year:
2009
Language:
english
File:
PDF, 213 KB
english, 2009
9

Finland

Year:
2010
Language:
english
File:
PDF, 331 KB
english, 2010
10

Finland

Year:
2011
Language:
english
File:
PDF, 334 KB
english, 2011
15

Study on Al2O3 Film in Anhydrous HF Vapor

Year:
2012
Language:
english
File:
PDF, 1.56 MB
english, 2012